In situ nanomechanical testing in focused ion beam and scanning electron microscopes
نویسندگان
چکیده
منابع مشابه
In situ nanomechanical testing in focused ion beam and scanning electron microscopes.
The recent interest in size-dependent deformation of micro- and nanoscale materials has paralleled both technological miniaturization and advancements in imaging and small-scale mechanical testing methods. Here we describe a quantitative in situ nanomechanical testing approach adapted to a dual-beam focused ion beam and scanning electron microscope. A transducer based on a three-plate capacitor...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2011
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.3595423